Air purification unit.
Apply: 410mm.
Power specifications: DC24V.
The more thin, more large wind ZN series flexible and quickly realize the cleaning.
Can be based on the size of the clean room selection of 3 sizes. Monitor the plasma light emission at 2 wavelengths.
To achieve a high precision, miniaturization, low price ZEN-20C3AR-A-V2 REFERENCE MANUAL.
Easily realize the monitoring of etching and cleaning of the endpoints ZEN-20C3AR-A-V2
Monitoring of plasma etching, cleaning the light emitting.
By using the filter to detect the 2 wavelength, the realization of miniaturization, low price. Actuator: Panel mount roller plunger.
Approved Standards: UL CSA EN.
Small, High-precision Enclosed Switch.
Small, High-precision Enclosed Switches with Built-in Basic,
Switches for High Repeatability and Durability of 10 Million,
Operations Minimum ZEN-20C3AR-A-V2 REFERENCE MANUAL.
Same mounting pitch as Z Basic Switch.
Requires less operating force than conventional limit switches.
Lineup includes modes with operation indicators for easy,
maintenance and inspection.
Approved by EN, UL, CSA, and CCC (Chinese standard).
(Ask your OMRON representative for Information on approved models ZEN-20C3AR-A-V2 REFERENCE MANUAL. ). Optical system: positive and negative radiation.
Detection distance: 40 positive and negative 2.5mm.
Beam shape: linear beam.
Beam diameter: 2000mm * 35 M.
Resolution: 0.4 M.
Cable length: 2m. Actuator: General purpose; Roller plunger; AC.
Mounting: Diagonal side mounting.
Approved standards: UL CSA.
General-purpose Enclosed.
Switches with High Breaking.
Capacity and High Durability.
Z General-purpose Basic Switches are built into ZE, ZV,
and ZV2 Switches. They provided high durability and high,
breaking capacity.
X Basic Switches with magnetic blowout are built into XE,
XV, and XV2 Switches. DC models havee also been added,
to the series ZEN-20C3AR-A-V2 Manual.
Three mounting methods (side, base, and diagonal side),
and many types of actuator are available.
Terminals face the front when the cover is removed for,
easy connection.
Switches with gground terminals have CE marking ZEN-20C3AR-A-V2 Manual.
Approved by UL, CSA, and CCC (Chinese standard).
(Ask your OMRON representative for information on approved models.)